Mass Flow Controllers
High precision in measurement and control. Rated pressure range: 0.1~0.8 MPa, Max. operating differential pressure: 0.4 MPa, Proof pressure: 1.5 MPa.
- High precision in measurement and control
Manufactured using proprietary calorimetry and diffusivity sensing technologies. - Communication protocol
RS485 Modbus RTU - Applicable Industries
Semiconductor, Laser welding, IoT
| Flow rate range | 0~50, 0~100, 0~200 Ln/min |
|---|---|
| Fluid | Air, N2, O2, Ar |
| Accuracy | ±1.5% R.D. ( 20 ~ 100% of full scale) ±0.3% F.S. ( < 20% of full scale) |
| Repeatability | ±0.5% R.D. ( 20 ~ 100% of full scale) ±0.1% F.S. ( < 20% of full scale) |
| Repeatability | 100:1 |
| Max. control range | 120%F.S. |
| Rated pressure range | 0.1~0.8 MPa |
| Max. operating differential pressure | 0.4 MPa |
| Proof pressure | 1.5 MPa |
| Settling time | 100 ms |
| Max pressure loss | 80 kPa (100L/min models) |
| Power supply | 24V DC,1A |
| Control valve | Nomal closed (N.C.) |
| Electrical connector | DB9 |
| Port size | 3/8、1/2 |
| Analog | Voltage 0~5V or Current 4~20mA |
| Max null shift (analog) | ±30 mVdc |
| Digital (※) | RS485 Modbus |
| Environment | Protection: IP40 Working temperature: 0~55°C (No freezing) Humidity: <95%RH (No condensation) Storage temperature: -20~70°C (No freezing) Reference conditions: Air(0°C，101.325 kPa) Certification: CE(EN61000-2;-3;-4) 、RoHS、REACH |
| Remark | ※ For the other digital interface, please contact the manufacturer. |
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