Mass Flow Controllers
Valve type : Proportional solenoid valve normally closed when power off (N.C.), 65K Full color TFT-LCD display, 4 Directions display for easy setup and viewing.
- 65K Full color TFT-LCD display.
- 4 Directions display for easy setup and viewing.
- Response time < 0.3 S.
- Switchable analog input/output and switch output.
- RS485 Modbus RTU.
- Applicable industries: Semiconductor, Laser Welding, IoT.
| Valve type | Proportional solenoid valve normally closed when power off (N.C.) |
|---|---|
| Fluid | Non-corrosive / Non-flammable gas: Dry air, N2, CO2, Ar |
| Flow rate | Air, N2, Ar : 200 L/min CO2 : 100 L/min |
| Display | 1.3" 65K Full color TFT-LCD display |
| Display - Flow control | Display range: 0 ~ 100 % F.S. Minimum Setting scale: LPM: 1 L/min, CFM: 1 ft3/min (※1) |
| Display - Pressure | Display range: -101 ~ 1000 kPa Minimum Setting scale: kPa: 1, MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1 |
| Display - Temperature | Display range: 0 ~ 50°C / 32 ~ 122 °F (Non-freezing) Minimum Setting scale: 0.1°C, 0.1°F |
| Display - Humidity | Display range: 10~90% RH Minimum setting scale: 0.1% RH |
| Accuracy - Flow control (※2) | Control accuracy: ±3% F.S. Repeatability: ±1% F.S. Temp. characteristic: ±5% F.S. (※3) Pressure characteristic: ±2% F.S. (※4) |
| Accuracy - Pressure | Indicator accuracy: ±2% F.S. Repeatability: ±0.1% F.S. |
| Accuracy - Temperature | Indicator accuracy: ±0.2 °C |
| Accuracy - Humidity | Repeatability: ±0.25% RH |
| Accuracy - Analog input and output | ±1% F.S. |
| Switch output | NPN open collector output: Max. load current : 200 mA, Max. supply voltage : 24 V DC, Voltage drop : ≤ 1.5 V PNP open collector output: Max. load current : 200 mA, Max. supply voltage : 24 V DC, Voltage drop : ≤ 1.5 V |
| Switch output - Output mode | Flow control: Tolerance mode, error mode |
| Switch output - Response time | Flow control: 0.3 s ( typ.) to the setting ± 2 % F.S. |
| Analog input and output (※5) | DC 1 ~ 5 V, 0 ~ 10 V, 4 ~ 20 mA |
| Communication interface | RS485 Modbus RTU |
| Power | Power supply voltage: DC 24 V Current consumption: ≤ 300 mA |
| Environment | Working pressure range: 300 ~ 500 kPa Standard differential pressure: 300 kPa (Inlet pressure : 300 kPa, Outlet pressure: 0 kPa) Withstand pressure: 1000 kPa Enclosure: IP40 Working fluid temp: 0 ~ 50 °C (No condensation or freezing) Ambient temp. range: Operation: 0 ~ 50 °C ; Storage: -10 ~ 60 °C (No condensation or freezing) Ambient humidity range: Operation / Storage: 35 ~ 85 % R.H. (No condensation) |
| Accessories | 2M cable |
| Weight | 685 g |
| Remark | ※1. When the display unit is CFM or ft3, the actual flow is the display value×10-2. ※2. Based on dry compressed air and measured by our standard flow meter as a reference for other gas. ※3. Benchmark : 25 °C ( Temperature range: 0 ~ 50 °C) ※4. Benchmark : Inlet pressure : 300 kPa, Outlet pressure : 1 atmospheric pressure, 25 °C ※5. Switchable, please follow the manual for setup. |
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