Fast Response Mass Flow Controller Manufacturer
Mainly designed for industrial automation systems requiring precise gas flow control, this product features a 1.3-inch TFT-LCD 65K full-color display with excellent visibility. The display orientation can be adjusted to match the installation direction for easy data reading. It simultaneously displays flow, pressure, temperature, and humidity information. With a response time of less than 0.3 seconds, it is equipped with a normally closed (N.C.) proportional solenoid valve that closes when de-energized. Analog input/output and switch output are selectable to meet various application requirements.
Applications: Semiconductor process gas control, laser processing equipment, precision IoT device control, and other gas measurement and control applications.
- High-precision closed-loop gas flow control for critical industrial processes.
- Fast response time under 0.3 seconds improves production efficiency.
- 65K full-color TFT-LCD display with four-direction viewing for easy monitoring.
- Simultaneously displays flow, pressure, temperature, and humidity data.
- Supports analog input/output, digital switching, and Modbus RTU communication.
- Compatible with PLC, HMI, SCADA, and Industrial IoT control systems.
- Stable proportional valve control ensures accurate and repeatable gas delivery.
- Suitable for Air, Nitrogen (N₂), Argon (Ar), and CO₂ applications.
- Reduces gas consumption while improving process consistency and energy efficiency.
- Ideal for semiconductor equipment, laser systems, smart factories, and precision manufacturing.
| Valve type | Proportional solenoid valve normally closed when power off (N.C.) |
|---|---|
| Fluid | Non-corrosive / Non-flammable gas: Dry air, N2, CO2, Ar |
| Flow rate | Air, N2, Ar : 200 L/min CO2 : 100 L/min |
| Display | 1.3" 65K Full color TFT-LCD display |
| Display - Flow control | Display range: 0 ~ 100 % F.S. Minimum Setting scale: LPM: 1 L/min, CFM: 1 ft3/min (※1) |
| Display - Pressure | Display range: -101 ~ 1000 kPa Minimum Setting scale: kPa: 1, MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1 |
| Display - Temperature | Display range: 0 ~ 50°C / 32 ~ 122 °F (Non-freezing) Minimum Setting scale: 0.1°C, 0.1°F |
| Display - Humidity | Display range: 10~90% RH Minimum setting scale: 0.1% RH |
| Accuracy - Flow control (*2) | Control accuracy: ±3% F.S. Repeatability: ±1% F.S. Temp. characteristic: ±5% F.S. (*3) Pressure characteristic: ±2% F.S. (*4) |
| Accuracy - Pressure | Indicator accuracy: ±2% F.S. Repeatability: ±0.1% F.S. |
| Accuracy - Temperature | Indicator accuracy: ±0.2 °C |
| Accuracy - Humidity | Repeatability: ±0.25% RH |
| Accuracy - Analog input and output | ±1% F.S. |
| Switch output | NPN open collector output: Max. load current : 200 mA, Max. supply voltage : 24 V DC, Voltage drop : ≤ 1.5 V PNP open collector output: Max. load current : 200 mA, Max. supply voltage : 24 V DC, Voltage drop : ≤ 1.5 V |
| Switch output - Output mode | Flow control: Tolerance mode, error mode |
| Switch output - Response time | Flow control: 0.3 s ( typ.) to the setting ± 2 % F.S. |
| Analog input and output (*5) | DC 1 ~ 5 V, 0 ~ 10 V, 4 ~ 20 mA |
| Communication interface | RS485 Modbus RTU |
| Power | Power supply voltage: DC 24 V Current consumption: ≤ 300 mA |
| Environment | Standard operating differential pressure: 350 kPa (Inlet pressure : 350 kPa, Outlet pressure: 0 kPa ) Operating differential pressure range (*6): 350 ~ 500 kPa Maximum operating pressure (*7): 700 kPa Enclosure: IP40 Working fluid temp: 5 ~ 50 °C (No condensation or freezing) Ambient temp. range: Operation: 5 ~ 50 °C ; Storage: -10 ~ 60 °C (No condensation or freezing) Ambient humidity range: Operation / Storage: 35 ~ 85 % R.H. (No condensation) |
| Accessories | 2M cable |
| Weight | 685 g |
| Remark | *1. When the display unit is CFM or ft3, the actual flow is the display value×10-2. *2. Based on dry compressed air and measured by our standard flow meter as a reference for other gas. *3. Benchmark : 25 °C ( Temperature range: 0 ~ 50 °C) *4. Benchmark : Inlet pressure : 350 kPa, Outlet pressure : 1 atmospheric pressure, 25 °C *5. Switchable, please follow the manual for setup. *6. The minimum operating differential pressure is the pressure differential required to achieve full scale flow with the secondary side released to atmosphere. *7. The maximum operating pressure is the maximum primary side pressure. |
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