Light Weight Flow Sensor｜Leak detection. Suitable for the semiconductor industry

Light Weight Flow Sensor

MFS

Inquiry
Response time ≤ 5 ms. Slim size. Light weight. Leak detection. Suitable for the semiconductor industry.
  • Response time ≤ 5 ms
  • Slim size
  • Light weight
  • Confirmation of small object adsorption
  • Leak detection
  • Suitable for the semiconductor industry
Measured flow rate range -10 ~ 10 L/min
Flow direction Unidirection, Bidirectional
Rated pressure range -100 ~ 200 kPa
Withstand pressure 300 kPa
Fluid Dry air, N2, Non-corrosive / Non-flammable gas
Power supply voltage 15 ~ 24V DC ±10%, Ripple (P-P) ≤ 10%
Current consumption ≤ 20mA
Accuracy-Repeatability ≤ ± 2% F.S.
Accuracy-Linearity Non-linearity
Accuracy-Temp. characteristic (*1) ≤ ± 0.3% F.S./°C ~ ≤ ± 0.6% F.S./°C
Accuracy-Pressure characteristic (*2) ± 5% F.S. ~ ± 10% F.S.
Response time ≤ 5ms (90% Response time)
Indicator Green LED
Analog output Voltage output range: 1~5V ±5% F.S. (±0.2V) (Non-linearity), Output Impedance: 1 KΩ
Environment IP40
Environment-Working fluid temp. 0 ~ 50°C (No condensation or freezing)
Environment-Ambient temp. range Operation : 0 ~ 50°C ; Storage : -10 ~ 60°C (No condensation or freezing)
Environment-Ambient humidity Range Operation : 0 ~ 50°C ; Storage : -10 ~ 60°C (No condensation or freezing)
Environment-Withstand voltage 1000V AC in 1-min (between case and lead wire)
Environment-Insulation resistance ≥ 50MΩ (500V DC, between case and lead wire)
Environment-Vibration Total amplitude 1.5mm or 10G, 10 Hz - 55 Hz - 10 Hz scan for 1 minute, 2 hours each direction of X, Y and Z
Environment-Shock 100m/s2 (10G), 3 times each in direction of X, Y and Z
Lead Wire Ø2.6 oil-resistance cable (PVC) - 26 AWG ( 0.15 mm2 ) - 3 cores
Weight-Product Product: Approx. 4 g (w/o Port) ; Approx. 9.6 g (M5 Port), Lead wire (3M): 31.8 g
Remark *1. Benchmark : 25°C (Temperature range : 0 ~ 50°C)
*2. Benchmark : 150 kPa (Pressure range : -100 ~ 200 kPa)
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