Built-in flow sensor type (Industry's first) is added to the lineup. Conventional pressure sensor mount type and no pressure sensor type are also prepared. Recommendable to semiconductor related equipment (chip mounter and handler) and vacuum transfer equipment for miniature work piece.
Ultra small body, but vacuum switchover with large flow is possible. 8.5L/min[ANR] or more at vacuum supply pressure -80kPa.
Blow-off air rate adjusting method is selectable. Not only a blow-off air rate adjusting type with a needle, but also cost effective fixed flow rate type is available. (At 0.5MPa air supply, over 9.5L/min[ANR])
Fluid medium
Air (JIS B 8392-1:Class1.2.1～2.4.3 compliant), Vacuum
