FUS21

Flow management and suction lift verification of small work piece are possible
  • High accuracy: Max. ± 3% F.S.
    Precise flow measurement is possible.
  • Quick response time: Max. 50 msec.
    High-speed response is realized by incorporating a platinum sensor chip processed with silicon micromachining and contributes to shorten cycle time.
  • Built-in needle valve model
    Flow adjustable needle valve and sensor are integrated into one unit. Easy piping and space saving.
  • Bi-directional flow measurement is possible
    Bi-directional flow model allows for pre-setting the flow direction as desired, which gives you installation flexibility. It can be used as a reverse flow detector.
  • Convenient display function is provided
    Reversible display function allows the orientation of display to rotate when the sensor is used upside down.
  • 2-color/dual display contributes to enhancing operability
    Operability is enhanced by the dual display. 2-color display allows for detecting abnormalities at a glance.
  • Flexible mounting options
    By a mounting bracket, a panel mount bracket or a DIN rail mount bracket
  • No straight piping section required
    No straight piping section is required at either upstream or downstream side.
  • A variety of connections
    Inch sizes are newly added.
  • Setting copy function is equipped
    Settings on master sensor can be copied to slave sensors.
  • Five types of gases can be measured
    Gas type switching functions is equipped.
Full scale flow rate 0.5, 1, 2, 5, 10, 20, 50, 100, 200 L/min
Fluid medium *1 Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), Compressed air(JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas, argon gas, carbon dioxide gas, mixed gas(argon+carbon dioxide)
Temp. range 0 ~ 50ºC (no freezing)
Pressure range -0.09MPa ~ 0.75MPa
Proof pressure 1MPa
Operating ambient temp. and hum. 0 to 50ºC, 90%RH or less
Storage temp. range -10 to 60℃
Accuracy *2,3 ±3%F.S. or less(Secondary side released to atmosphere)(The scope of warranty is in accordance with the "measurement flow rate range")
Repeatability *4 ±1%F.S. or less(Secondary side released to atmosphere)
Temperature characteristics Within ±0.2%F.S./ºC(15 to 35ºC, 25ºC criteria)
Pressure characteristics Within ±5%F.S.(Criteria: secondary side released to atmosphere) / For flor rate 201 model:Within ±5%F.S.(Criteria: 0.35)
Response time *5 50msec or less(When response time setting is OFF)
Switch output (NV/NVC/NA/NAC) NPN open collector output(50mA or less, voltage drop 2.4V or less)
Switch output (PV/PVC/PA/PAC) PNP open collector output(50mA or less, voltage drop 2.4V or less)
Analog output *6(NV/NVC/PV/PVC) 1to 5V voltage output(connecting load impedance 50kΩor less)
Analog output *6 (NA/NAC/PA/PAC) 4 to 20mA current output(connecting load impedance 0 to 300Ωor less)
Power supply voltage *7 (NV/NVC/PV/PVC) DC12 to 24V (10.8 to 26.4V) ripple rate 1% or less
Power supply voltage *7 (NA/NAC/PA/PAC) DC24V (21.6 to 26.4V) ripple rate 1% or less
Current consumption *8 45mA or less
Lead wire ø3.7, AWG26 or equivalent x 5-conductor (connector), insulator O.D. ø1.0
Functions *9 (1) Gas type switching, (2) Setting copy function, (3) Flow rate integration, (4) Peak hold, et.c
IP rating IP40 equivalent
Protection circuit *10 Power supply severse connection protection, switch output reverse connection protection and switch output load short-circuit protection
Vibration resistance 10 to 150Hz, max.100m/s², 2 hours each in X, Y, Z direction
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Mounting orientaion *11 Unrestricted in vertical/horozontal direction
Straight piping section *12 Not required
Note *1. Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. When using compressed air, use clean air that complies with JIS B 8392-1:2012 Class 1.1.1 to 1.6.2. Compressed air from the compressor contains drain (water, oil oxide, foreign substances, etc.). To maintain the function of the product, install a filter, air dryer (min. pressure dew point 10°C or less), and oil mist filter (max. oil content concentration 0.1 mg/m³) on the upstream side of the product.
*2. Compressed air is used for adjustment and inspection of this product. Accuracy for gas types other than air is only a guide.
*3. The accuracy is based on the manufacturer's standard flow rate meter. It does not represent absolute accuracy. Repeatability, temperature characteristics, and pressure characteristics are not included in accuracy ± 3% F.S. Take a nessessary step depending on the operating environment and conditions.
*4. Repeatability is calculated during a short period of time. Aging variation is not included.
*5. Actual response time may differ depending on piping conditions. Response time can be set within the range of 50 msec. to 1.5 sec.
*6. The output impedance of analog output type is about 1kΩ. In the case the impedance of the connecting load is low, output and error increase. Check error with the connecting load before using.
*7. The power supply voltage specifications differ for the voltage output type and the current output type.
*8. Current when 24 VDC is connected and no load is applied. The current consumption will vary depending on how the load is connected.
*9. The gas type switching function enables it to switch to argon, carbon dioxide, argon 80% + carbon dioxide 20%. The details are as follows. Note that the full scale flow rates become half of those of the flow rate range when switching to carbon dioxide gas.
*10. The protection circuit of this product is effective only for specific error connections and load short-circuits. It does not provide protection for all misconnections.
*11. The product measures changes in heat distribution caused by flow. If installed vertically, the heat distribution may change due to theeffect of convection, and the zero point can shift.
*12. Accuracy may be affected by the piping conditions. For more accurate measurement, provide a straight pipe section 10 times as long as the pipe inner diameter.
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